WIT Press

Simulation and Design of Microsystems and Microstructures

Paper Listing

Simulation Supported Design Of LIGA Microsystems

Author(s): K.-R Kamper, J. Dopper, W. Ehrfeld, B. Hagemann, S.D.J. Hill & H.Lehr

Pages: 8 Page Range: 0 - 0 Size: 1,027 kb Price: Free (open access)

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Overview Of The CAEMENS Framework And Optimization Of MEMS Using Statistical Optimal Design Of Experiments

Author(s): S.B. Crary, J.R. Clark & O.S. Juma

Pages: 8 Page Range: 0 - 0 Size: 871 kb Price: Free (open access)

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Experimental Results On The Behaviour Of Micromechanical Structures Made By The LIGA Technique

Author(s): C. LeBmollmann

Pages: 9 Page Range: 0 - 0 Size: 936 kb Price: Free (open access)

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A Design System For Kinetic Micro Mechanical Components

Author(s): J. Mehner & W. Dotzel

Pages: 8 Page Range: 0 - 0 Size: 1,191 kb Price: Free (open access)

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Interdisciplinary Aspects Of Microsystem Design

Author(s): M.J. Schachler, A. Lahrmann & H. Reichl

Pages: 7 Page Range: 0 - 0 Size: 693 kb Price: Free (open access)

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Design And Simulation Of Silicon And Metal Microstructures

Author(s): E. Chowanietz & A. Lees

Pages: 8 Page Range: 0 - 0 Size: 798 kb Price: Free (open access)

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LIDO: Mask Verification For LIGA Designs

Author(s): R. Briick & K. Hahn

Pages: 8 Page Range: 0 - 0 Size: 1,011 kb Price: Free (open access)

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From CAD Through Manufacturing To Quality Control Of Microstructures

Author(s): K.R. Scherer, H. Eggert, P. Buchberger, P. Stiller & U. Stucky

Pages: 8 Page Range: 0 - 0 Size: 1,052 kb Price: Free (open access)

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Design And Analysis Of A Resonant Gyroscope Suitable For Fabrication Using The LIGA Process

Author(s): L. Yao, E. Chowanietz & M. McCormick

Pages: 9 Page Range: 0 - 0 Size: 772 kb Price: Free (open access)

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A Hybrid Actuator For Articulated Micro-grippers

Author(s): N. Troisfontaine & Ph. Bidaud

Pages: 7 Page Range: 0 - 0 Size: 518 kb Price: Free (open access)

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A Computer Program For Ellipsometric Rough Surface Measurements

Author(s): St. lovan, I. Boca & A. lovan

Pages: 6 Page Range: 0 - 0 Size: 510 kb Price: Free (open access)

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An Architecture For Process Planning, Analysis And Simulation In Microsystems Technology

Author(s): M. Huber & F. Neuscheler

Pages: 8 Page Range: 0 - 0 Size: 902 kb Price: Free (open access)

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A Design Simulation System For Microstructures

Author(s): R.A. Adey, A. Neves, J.M.W. Baynham & S.M. Niku

Pages: 8 Page Range: 0 - 0 Size: 530 kb Price: Free (open access)

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Coupled Field Calculations Of A Micromachined Flow Sensor With Different Finite Element Analysis Programmes

Author(s): S. Messner, N. Hey & H.E. Pavlicek

Pages: 8 Page Range: 0 - 0 Size: 785 kb Price: Free (open access)

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Automated Simulation And Analysis Of Electrostatic Micromotors

Author(s): T.B. Johansson, K. Hameyer & R. Belmans

Pages: 8 Page Range: 0 - 0 Size: 795 kb Price: Free (open access)

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Simulation Of Microsystems Using A Behavioural Hybrid Simulator Alecsis

Author(s): Z. Mrcarica, D. Glozic, V. Litovski & H. Better

Pages: 8 Page Range: 0 - 0 Size: 804 kb Price: Free (open access)

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Specific Problems Of FEM Thermal Simulations For Microsystems

Author(s): A. Gotz, C. Cane & E. Lora-Tamayo

Pages: 10 Page Range: 0 - 0 Size: 969 kb Price: Free (open access)

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A New Calculation Method Of Thermal Environment In Microsystems And Experimental Verification

Author(s): J. Helm

Pages: 8 Page Range: 0 - 0 Size: 569 kb Price: Free (open access)

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Microsystems And Microstructures 155 Fluid Modelling In Micro Flow Channels

Author(s): M.J. Harper, C.M. Turner & J.E.A. Shaw

Pages: 9 Page Range: 0 - 0 Size: 1,003 kb Price: Free (open access)

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3D Coupled Electro-mechanical Simulations In Microstructures

Author(s): T. Angulo, S. Marco & J. Samitier

Pages: 10 Page Range: 0 - 0 Size: 937 kb Price: Free (open access)

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Modelling And Simulation Of Microresonators With Meander Suspensions

Author(s): O.K. Fedder & K.H. Clark

Pages: 9 Page Range: 0 - 0 Size: 888 kb Price: Free (open access)

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On The Simulation Of Subminiature Condenser Microphones Using Finite Differences

Author(s): M. Pedersen, W. Olthuis & P. Bergveld

Pages: 8 Page Range: 0 - 0 Size: 750 kb Price: Free (open access)

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A Linear Reluctance Self-oscillating Motor

Author(s): M. Rizzo

Pages: 8 Page Range: 0 - 0 Size: 559 kb Price: Free (open access)

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Modular Solution Approach For Simulation Of Coupled Physical Phenomena

Author(s): S. Schulte, A. Maurer & H. Bungartz

Pages: 9 Page Range: 0 - 0 Size: 933 kb Price: Free (open access)

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Field Simulation Of The Elevation Force In A Rotating Electrostatic Microactuator

Author(s): P. Di Barba, A. Saving & S. Wiak

Pages: 5 Page Range: 0 - 0 Size: 459 kb Price: Free (open access)

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An Integrated Design And Simulation Tool For Jit-structures

Author(s): A. Lahrmann

Pages: 8 Page Range: 0 - 0 Size: 718 kb Price: Free (open access)

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Optimization Problems Of Semiconductor Gas Sensors

Author(s): E.E. Gutman

Pages: 8 Page Range: 0 - 0 Size: 673 kb Price: Free (open access)

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Optimization Of The Electrode Shapes Of Micromachined Piezoelectric Microphones To Minimise The Influence Of In-plane Stress On The S/N Ratio

Author(s): R. Schellin, P. Bergveld, W. Olthuis, R. Kressman & B. Wagner

Pages: 8 Page Range: 0 - 0 Size: 763 kb Price: Free (open access)

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A Knowledge Based Design And Simulation Tool For U-systems

Author(s): A. Lahrmann

Pages: 6 Page Range: 0 - 0 Size: 638 kb Price: Free (open access)

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Modelling Of Metal Alloy Contacts To Semiconductor Substrate

Author(s): T. Rang

Pages: 8 Page Range: 0 - 0 Size: 698 kb Price: Free (open access)

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A General CAD Concept And Design Framework Architecture For Integrated Microsystems^

Author(s): A. Poppe, J.M. Kararn, K. Hoffmann, M. Rencz, B. Courtois, M. Glesner & V. Szekely

Pages: 8 Page Range: 0 - 0 Size: 803 kb Price: Free (open access)

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Comparison Of Electrical Device Representations Of Physical Differential Equations

Author(s): J. Bielefeld, G. Pelz & G. Zimmer

Pages: 5 Page Range: 0 - 0 Size: 427 kb Price: Free (open access)

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An Investigation Of Computer Modelling For Micro-injection Moulding

Author(s): S.D.J. Hill, K.R Kamper, U. Dasbach, J. DOpper, W. Erhfeld & M. Kaupert

Pages: 9 Page Range: 0 - 0 Size: 1,292 kb Price: Free (open access)

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Low Temperature Wafer Bonding On Silicon Nitride

Author(s): A.G. Pedrine, J.C. De Poorter, L. De Schepper & K. Baeif

Pages: 8 Page Range: 0 - 0 Size: 742 kb Price: Free (open access)

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Development Of An Electrochemical Microanalytical System: From Specification To Realization

Author(s): W. SuB, H. Eggert, M. Gorges-Schleuter, W. Jakob K. Lindemann, W. Hoffman & R. Rapp

Pages: 8 Page Range: 0 - 0 Size: 1,364 kb Price: Free (open access)

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Simulation Of Encapsulation Stress In A Micromachined Silicon Membrane Pump

Author(s): G. Kelly, J. Alderman, C. Lyden & J. Barrett

Pages: 7 Page Range: 0 - 0 Size: 617 kb Price: Free (open access)

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Modelling And Simulation Of An Intelligent Motion Surface In MEMS

Author(s): W. Liu, P. Will & M. Pottenger

Pages: 9 Page Range: 0 - 0 Size: 989 kb Price: Free (open access)

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Simulation Tools For Micro Electro Mechanical Systems

Author(s): B. Folkmer & H. Sandmaier

Pages: 8 Page Range: 0 - 0 Size: 916 kb Price: Free (open access)

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Simulation Supported Design Of Micromechanical Sensors

Author(s): S. Majer & U. Mescheder

Pages: 9 Page Range: 0 - 0 Size: 780 kb Price: Free (open access)

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Simulation and Design of Microsystems and Microstructures

Transaction

WIT Transactions on The Built Environment

Volume

13

Print ISBN

978-1-85312-390-0

Edited By

R.A. ADEY, Wessex Institute of Tehnology U.K, A. LAHRMANN, Technical University of Berlin, Germany and C. LESSMOLMANN, microParts GmbH, Germany

Electronic ISSN

1743-3509

Published

1995

Pages

350