Author(s)

T.B. Johansson, K. Hameyer & R. Belmans

Abstract

Industry's interest in micro electro-mechanical systems is rapidly growing. The very small scale, airgaps of 1 to 10 }im and overall dimensions less than 1 mm, makes the electrostatic field beneficial compared to the magnetic field. As a consequence, most of these micro devices are electrostatic energy converters. Due to new processes to manufacture microactuators and micromotors as e.g. "X-ray LIGA" Mohr et. al. [1], "Deep UV Lithography" Engelman et. al. [2], "plasma etching" etc. the number of possible structures has grown as well as the precision with which they can be manufactured. Therefore, there is an increasing need for better analysis tools. The demand is for them to be faster and more accurate, but also more flexible and easy to use. This paper discusses two new techniq

Keywords