Author(s)

S.B. Crary, J.R. Clark & O.S. Juma

Abstract

Overview of the CAEMENS framework and optimization of MEMS using statistical optimal design of experiments S.B. Crary, J.R. Clark, O.S. Juma Center for Integrated Sensors and Circuits, Electrical Engineering and Computer Science Department, The University of Michigan, ABSTRACT We present an overview of CAEMEMS, our software framework for CAD and CAE of micro-electro-mechanical systems (MEMS). In its current beta-test release, CAEMEMS features a sophisticated graphical user interface and the capability to design diaphragm-based pressure sensors. CAEMEMS includes a variety of features such as the ability to launch multiple finite-element analyses for analysis of the sensitivity of a given design to variations in geometry, forcing functions, and material properties. A new capability, known as designed analysis, allows for the automated use of designed experiments, that is, the launching and retrieval of sets of analyses in which the variables are chang

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