Author(s)

C. LeBmollmann

Abstract

A major part in the design of micromechanical systems and microstructures is the prediction of the functional behaviour by means of a static, dynamic and thermal analysis. A fundamental basis of this analysis is the knowledge about the real behaviour of this type of structures, especially when the materials are fabricated in a casting process like the LIGA process. Here, the material properties can change locally against the macroscopic material and calculations focussing on a small structure can be completely wrong, if they are based on macroscopic material properties. Substantial experimental work was done on LIGA microstructures made from metal and plastic materials and the results of # Force-Displacement Tests • Modal Analysis • Direct Stress Evaluation

Keywords