Author(s)

J. Mehner & W. Dotzel

Abstract

A design system for kinetic micro mechanical components J. Mehner, W. Dotzel Department of Microsystem and Device Technology, Technical University Chemnitz-Zwickau, D-09107 Chemnitz, Germany 1. Characteristics of the design process of micro mechanical components Kinetic components are used in many applications mainly in transducers or actuators. Usually they were produced by bulk micro mechanical technologies. These components have movable parts with dimensions in the range of microns. They consist of flexible and rigid body structures which are made of single crystal silicon. In the most cases they can be described as simple spring- mass-damper systems. The design process of micro components is comparable with those of the classical device development. A methodical design process can be used successfully with the known phases problem analysis, principle design and shape design. Nevertheless new considerations must be done. Specific problems of designing kinetic micro components are:

Keywords