WIT Press


Simulation Supported Design Of LIGA Microsystems

Price

Free (open access)

Paper DOI

10.2495/MIC950011

Volume

13

Pages

8

Published

1995

Size

1,027 kb

Author(s)

K.-R Kamper, J. Dopper, W. Ehrfeld, B. Hagemann, S.D.J. Hill & H.Lehr

Abstract

Recent progress in the maturation of LIGA technology with its large inherent potential for the cost-effective mass fabrication of complex microstructures, has led to an increased commercial interest for microproducts. The use of modern computer simulation tools to achieve competitive development cycle times and optimum technical performance is one of the essential prerequisites for the successful development of marketable and application suitable microsystems. In this paper examples for the use of simulation tools for the optimisation of various microsystems are presented, including the use of electromagnetic analysis software, flow modelling and simulation of the injection moulding process. The results clearly indicate the advantages to be ga

Keywords