Author(s)

S. Messner, N. Hey & H.E. Pavlicek

Abstract

A resonant silicon microstructure with electrothermal excitation and resistive detection with NiCr strain gauges is used for fluid sensor application. Sensor features like thermal fluid-structure interactions and dynamic properties are investigated by finite element analysis. Coupled calculations of structure mechanical and fluid mechanical interactions are undertaken. The different programmes ANSYS and FIDAP are connected by implemented interfaces. 1 Introduction The complexity of micro-electro-mechanical systems (MEMS) with several physical phenomena of excitation, transducing and detection requires the consideration of the coupled field interactions for those phenomena [1]. As an example, we model a resonant silicon beam mic

Keywords