Author(s)

A. Poppe, J.M. Kararn, K. Hoffmann, M. Rencz, B. Courtois, M. Glesner & V. Szekely

Abstract

Besides foundry facilities, CAD-tools are also required to move microsystems from research prototypes to an industrial market. CAD tools of microelectronics have been developed for more than 20 years, both in the field of circuit design tools and in the area of TCAD tools. Usually a microelectronics engineer is involved only in one side of the design: either he deals with application design or he is par- ticipating in the manufacturing design, but not in both. This is one point that is to be followed in case of microsystem design, if higher level of design productivity is expecte

Keywords