Author(s)

R.A. Adey, A. Neves, J.M.W. Baynham & S.M. Niku

Abstract

A design simulation system for microstructures R.A. Adey, A. Neves, J.M.W. Baynham, S.M. Niku Computational Mechanics BEASY, Ashurst Lodge, Ashurst, Southampton, SO40 7AA, UK ABSTRACT This paper describes some of the results of the MASS project to develop an integrated environment for the analysis and simulation of microsystem/micro- structure devices, components and processes. The systems comprises tools to enable the designers of microsystems to shorten the time to design new products, reduce the cost of development, increase quality and reliability and finalise product specification at the design stage to eliminate the need for expensive prototypes. Application of the system and comparisons with experimental data are pre- sented. 1.0 Overview Of The System Microsystems, microcomponents and microstructures in addition to electronic components are all used in the engineering industry as part of systems and micromechanical components which, for example form, parts of integrated se

Keywords