WIT Press


Simulation Supported Design Of Micromechanical Sensors

Price

Free (open access)

Paper DOI

10.2495/MIC950391

Volume

13

Pages

9

Published

1995

Size

780 kb

Author(s)

S. Majer & U. Mescheder

Abstract

Simulation is essential for top down orientated development of micromechanical sensors. Finite element methods have been used to simulate mechanical and electrical behaviour of sensors. The coupling algorithm has been implemented into a commercial FEM-tool (ANSYS). The results of 3D anisotropic calculations have been applied to a two-axes-tilt-sensor. Optimized designs and fabrication process parameters are extracted from the calculated data. Introduction Top down approaches for microsystems (e.g. micromechanical sensors) are still not possible due to the high complexity of such systems. However, several groups have just presented interesting concepts and some results which will give support in the development of microsystems [1, 2]. Nevertheless, there is no satisfying solution for al

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