Author(s)

A. Lahrmann

Abstract

The miniaturization of electronics in the last two decades leads to the age of computers and has revolutionized the human life. The history is well known and will be repeated in the field of mechanics. The application of three-dimensional micro-structures will open new fields, for example in medicine, bionics. The combination of micro-structures with electronics on one chip results in a new field of powerful micro-systems, i.e. sensors. The development is very expen- sive and the tools are not able to deliver a complete solution. Therefore the need of an integrated approach is necessary and the first results are presented here. Introduction This paper describes a general approach to solve multifield problems simultane- ously. Additionally to speed up the design cycle an optimizat

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