Author(s)

J. Bielefeld, G. Pelz & G. Zimmer

Abstract

Microsystems consisting of minituarized mechanics, electronics, and other components are describable with sets of differential equations. These sets can be transformed into different equivalent electrical device representati- ons. Existing device representations are discussed and comparisons are done by example. 1 Introduction The dynamics of physical behaviour is described by sets of differential equations (DE-sets). The modeling of e.g. micromechanical components is achieved either directly by DE-sets or indirectly by applying the method of finite differences FDM or the method of finite elements FEM from the theory of structure mechanics. Also

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