Author(s)

K.R. Scherer, H. Eggert, P. Buchberger, P. Stiller & U. Stucky

Abstract

In the Institute of Applied Computer Science (IAI) in the Forschungszentrum Karlsruhe (FZK) information technologies are developed and applied to support the manufacturing process for micromechanical structures, based on LIGA (Ger- man Acronym for Lithographic, Galvanik, Abformung) technique, developed in the Institute for Microstructure Technique (IMT) of the FZK. The information related kernel of the computer integrated manufacturing consists of different se- mantic clusters. In the first step, at the beginning of the whole manufacturing process, the designer has to construct the microstructure. These 3 -dimensional microstructures are designed with a CAD system for mechanical construction. After application of design checks and design rules, based on heuristics from hu- man experts, these co

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