Author(s)

R. Schellin, P. Bergveld, W. Olthuis, R. Kressman & B. Wagner

Abstract

Optimised electrode shapes of micromachined piezoelectric microphones have been developed, which take the influence of in-plane stress on the signal- to-noise-ratio (S/N) into account. A simulation program, using MATLAB, based on the direct solution method has been developed in order to simulate the acoustically induced stress patterns of flat diaphragms with residual ten- sile in-plane stress. The calculation of the output voltage of the microphone is also included. To determine the A-weighted spectral input voltage noise density of the microphone/a

Keywords