Author(s)

E.E. Gutman

Abstract

Microsystems and Microstructures 227 Optimization problems of semiconductor gas sensors E.E. Gutman Laboratory of Sensor Modelling, Karpov Institute of Physical Chemistry, 103063 Moscow, Russia Abstract Modern requirements to semiconductor gas sensors are connected with the optimisation of gas sensitive sen- sor properties. The solution of this problem is based on a detailed investigation of physical- and physico-chemical processes in sensor materials. Ma- thematical modeling of electroconductlvity kinetics is used for continuous gas analysis method. Consi- derable attention in the sensitivity problem is given to questions competitive gas adsoption, the inter- action of doped metal with metal oxide, the thickness and structure of metal oxide film. The selectivity problem is being solved by using the vibrational ex- citation of molecules. Such dynamical method as fli- cker noise is being developed to make an estimate of selectivity

Keywords