Author(s)

M. Huber & F. Neuscheler

Abstract

The authors present an integrated process optimization architecture for micro- systems technology. This paper will focus on process specification, planning, analysis, and simulation as essential part of this overall architecture. The meth- ods and tools realizing this architecture are described in detail. For validation of the architecture, the L1GA technology is considered. Introduction According to VDI/VDE [1], currently more than 3700 enterprises in Germany have at one's disposal microtechnological processing utilities. The markets will develop dynamically in the near future. So, for instance, the first attempts are undertaken to establish a low volume production in a dedicated laboratory at the Research Centre Karlsruhe. The tec

Keywords