WIT Press


Methods For Description Of Microelectro- Mechanical Device Models For System-level Simulation

Price

Free (open access)

Paper DOI

10.2495/MIC970271

Volume

34

Pages

10

Published

1997

Size

949 kb

Author(s)

Z. Mrcarica, Z. Randjelovic, M. Jakovljevic, V.B. Litovsku & H. Better

Abstract

Behavioural simulators and their modelling languages, so-called hardware description languages (HDL) enable simulation of electromechanical and other mixed-domain systems. For modelling of microelectromechanical devices, partial differential equations (PDE) are often necessary. They are not directly supported by HDLs, but can be described by some method of discretization. We have proven that simple, yet effective finite difference method can enable modelling of complex microelectromechanical devices. Our recent experiments have shown that finite element method is even better suited for application in a HDL. 1 Introduction Usage of technologies that are developed l

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