WIT Press


Detection Of Fluorinated Gases Using Piezoelectric Quartz Crystal Coated With Plasma-polymerized Styrene Derivatives

Price

Free (open access)

Paper DOI

10.2495/MIC970061

Volume

34

Pages

6

Published

1997

Size

424 kb

Author(s)

S. Kurosawa, D.B. Radloff, N. Minoura, J. Miyake & M. Demura

Abstract

We report preliminary results on the detection of fluorinated gases using a piezoelectric quartz crystal coated with plasma-polymerized styrene (pp-St) and pentafluorostyrene (pp-PFSt). The degree of saturation sorption of fluorinated gases on pp-PFSt is 1.2 - 4.8 times larger than that of these gases to pp-St. 1. Introduction Plasma polymerization has recently been used to form ultrathin films on a variety of substrates. A plasma-polymerized film adheres firmly to a

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