WIT Press


Some Applications Of The New Generation Of CAD Tools To Micro And Nanosystems

Price

Free (open access)

Paper DOI

10.2495/MIC970251

Volume

34

Pages

10

Published

1997

Size

958 kb

Author(s)

M. Djafari Rouhani, R. Malek, A.M. Gue, A. Esteve, H. Idrissi-Saba, Z. Moktadir & H. Camon

Abstract

The need for a new generation of Technology CAD tools based on atomic scale modelling to meet the future needs of the microelectronic industry for the sub micron devices and the microsystems design has been described. It is stated how a cascade of different types of modelling going from the basic atomistic level to macroscopic continuum can be linked together, each feeding parameters into the higher level modelling. Four examples of fields in which we have been involved are given. The heteroepitaxial growth where the strain

Keywords