Author(s)

A. Klein & G. Gerlach

Abstract

The scope of this paper is to introduce an approach to model piezoelectric bimorphs as electro-mechano-fluidic transducers, where a physical description in terms of bending equations is used, rather than functional description. Since the partial differential equations for the bending of the bimorph can not directly be represented by an Analog Hardware Description Language, they are discretized using Finite-Difference Method and implemented into MAST, the modelling language of SABER. The model can be used to simulate the bi- directional coupling between electrical and mechanical sub-systems. As an example, the behaviour of a piezoelectric driven membrane is investigated for application in microfluidic systems. 1 Introduction The desig

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