WIT Press


Design And Numerical Analysis Of An Electro- Mechanical Microsystem For Material Parameter Extraction

Price

Free (open access)

Paper DOI

10.2495/MIC970211

Volume

34

Pages

10

Published

1997

Size

824 kb

Author(s)

P. Voigt, G. Schrag & G. Wachutka

Abstract

The increasing complexity of microsystem designs requires the simulation at system level. We demonstrate that a pragmatic and efficient approach consists in the appropriate extension of standard electric circuit simulation, using compact models written in HDL-A for the nonelectrical parts of the microsystem. To this end we developed a microsystem that exhibits a strong electro-mechanical coupling. Based on the results of numerical simulations we propose it as a test-structure for the easy to perform electrical measurement of mechanical material properties. 1 Motivation With growing complexity of microstructures and microsystems, computer- assisted design and computer simulations of the operation of the constitu- ent compone

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