Author(s)

J.I. Seeger & S.B. Crary

Abstract

We review our earlier work that explained how a series capacitance implements negative feedback and stabilizes electrostatically actuated MEMS devices against the well known "pull-in" instability. We demonstrate through analysis and computer simulation that sta- bility can be achieved using a series MOS capacitor. We also show that using MOS capac- itor feedback can reduce the supply voltage required to deflect the mechanical members and can introduce both an electrostatic deflection limit as well as hysteresis. 1 Introduction One of the difficulties inherent in the use of electrostatically actuated MEMS de- vices; such as pressure sensors, accelerometers, or comb-drive actuators; is an in- stability known as "pull-in" tha

Keywords