WIT Press


Simulation Of A Torsional Capacitive Accelerometer And Interface Electronics Using An Analog Hardware Description Language

Price

Free (open access)

Paper DOI

10.2495/MIC970191

Volume

34

Pages

10

Published

1997

Size

853 kb

Author(s)

J.M. Gomez-Cama, O. Ruiz, S. Marco, J.M. Lopez- Villegas & J. Samitier

Abstract

A clear trend in Microsystems technology is towards the integration of mechanical and electronic functions. In many interfacing approaches, the interaction between the electronics and the mechanical parts is fundamental for the correct operation of the devices. Here we present how this interaction can be handled taking advantage of the possibilities of the analog hardware description languages. This modelling and simulation approach is applied to the joint simulation of a torsional capacitive accelerometer and the interfacing electronics. Notation cross-section b2

Keywords