Author(s)

B. Romanowicz, C. Schotf, M. Laudon, P. Larch, P. Renaud, R.S. Popovic, H.P. Amann, A. Boegli, V. Moser & F. Pellandini

Abstract

Specification, simulation and optimization of sensors and actuators can be done through behavioral modeling using analog hardware description languages. The resulting models can be used in conjunction with models of the associated electronics to simulate a complete microsystem. This paper presents VHDL 1076.1 modeling considerations applicable to microsystem design and simulation. The methodology will be applied in the case of a Hall magnetic sensor. 1 Introduction Microsystems can be defined as systems of small dimensions essentially composed of sensors/actuators and a signal processing part, and are often described as micro-electro-mechanical-systems or MEMS. Usually, the sensors and actuators are made of silicon (Si) microstructures whil

Keywords