Author(s)

O. Francais, I. Dufour & E. Sarraute

Abstract

In this paper, a static model of a circular or square membrane under both pneumatic and electrostatic actuation is presented. This model provides an understanding of some of the essential characteristics (deflection, strike volume, capacity) for numerous applications (accelerometer, pressure sensor, (thermo)pneumatic or electrostatic micropump, etc.). Using these results along with some particular phenomena of the electrostatic actuation (sticking and hysteresis), the global dynamic simulation of an electrostatic micropump is then performed. 1. Introduction Because electrostatic actuation is governed by no

Keywords