WIT Press


Membrane Deflection Under Pneumatic And Electrostatic Actuation Without FEM Simulation: Application To Electrostatic Micropump

Price

Free (open access)

Paper DOI

10.2495/MIC970161

Volume

34

Pages

10

Published

1997

Size

962 kb

Author(s)

O. Francais, I. Dufour & E. Sarraute

Abstract

In this paper, a static model of a circular or square membrane under both pneumatic and electrostatic actuation is presented. This model provides an understanding of some of the essential characteristics (deflection, strike volume, capacity) for numerous applications (accelerometer, pressure sensor, (thermo)pneumatic or electrostatic micropump, etc.). Using these results along with some particular phenomena of the electrostatic actuation (sticking and hysteresis), the global dynamic simulation of an electrostatic micropump is then performed. 1. Introduction Because electrostatic actuation is governed by no

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