WIT Press


Design And Simulation Of A Silicon Micro Fabricated Photoacoustic Gas Sensor

Price

Free (open access)

Paper DOI

10.2495/MIC970121

Volume

34

Pages

10

Published

1997

Size

742 kb

Author(s)

M. Weber, P. Lerch & P. Renaud

Abstract

We present the modeling and simulation of a photoacoustic sensor. Starting from detailed simulations of the microsystem components, i.e. the IR-source, the cavity, and the microphone, we present a global simulation of the detector. The temperature profile in the photoacoustic cavity has been studied. Analytical key design rules for optimization of the detector's performance are discussed. 1 Introduction The principle of photoacoustic gas detection is based on the measurement of the pressure variation generated in a cavity by selective absorption of infrared (IR) radiation [1-4]. The acoustic signal can be detected by a microphone. All components of the gas detector system are silicon micromachined. _ Membrane for acoustic

Keywords