WIT Press


Production Of CrN/NbN Superlattice Coatings By Cathode Switching Reactive Cathodic Arc Evaporation

Price

Free (open access)

Paper DOI

10.2495/SURF030071

Volume

39

Pages

10

Published

2003

Size

1179.19 kb

Author(s)

C. Pecchio, E. Bemporad, D. De Felicis, S. De Rossi & F. Carassiti

Abstract

Production of CrNINbN superlattice coatings by cathode switching reactive cathodic arc evaporation C. ~ecchio', E. ~ e r n ~ o r a d ~ , D. De ~ e l i c i s ~ , S. De ~ o s s i ' & F. carassiti2 I Surface Engineering Dept, Istituto Scientijico Breda S.p.A., Italy 2 Mechanical and Industrial Engineering dept., Univ. "ROMA TRE" Italy Abstract CrN/NbN superlattice and CrN coatings, approximately 3 pm in thickness, have been deposited on tool steel samples by a modified reactive cathodic arc evaporation technique (CAE) in an industrial-size chamber. Superlattice deposition was achieved by triggering alternatively on Cr and Nb cathodes, obtaining layers of about 4-5 nanometers. X-ray diffraction, scanning and transmission electron microscopy, atomic force microscopy and energy dispersive X-ray analysis were used to determine microstructure and chemical composition of both coatings and coating defects. Diffraction techniques showed for the CrN coating a (220) preferred orientation and a strongly p

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