Author(s)

A. Tsuchiyama, Y. Shima & H. Hasuyama

Abstract

Adhesive strength of DLC films prepared by ionization deposition A. ~suchiyama', Y. shimal* & H. ~asuyarna~ I Fukuoka Industrial Technology Center, Japan I *Fukuoka Industrial Technology Center, Japan Japan Society for the Promotion of Science, Domestic Research Fellow 2 Kurume Institute of Technology, Japan Abstract Diamond-like carbon (DLC) films are considered to be promising to develop extensively for practical applications owing to their good properties. Improvement of adhesive strength of DLC films to substrates is required to enhance their suitability and reliability. The purpose of this study is to investigate the influence of the preparation conditions of DLC films on the adhesion. DLC films were prepared from benzene gas by the ionization deposition method. Three different anode voltages of 50, 75 and 100 V were applied during deposition. The substrates used were WC-Co, austenitic 18Cr- 8Ni stainless steel and AI-Mg alloy. The adhesive strength was measured by a tensile pull-off tes

Keywords