Author(s)

N.J.M. Carvalho. B.J. Kooi & J. Th.M. De Hosson

Abstract

On the microstructure and deformation mechanisms under indentations of TiN/(Ti,Al)N multilayer coatings N.J.M. Carvalho, B. J. Kooi & J.Th.M. De Hosson Department of Applied Physics, Materials Science Center and Netherlands Institute for Metals Research, University of Groningen, Nijenborgh 4, 9747AG Groningen, The Netherlands Abstract Commercially available multilayer TiN/(Ti,AI)N coatings deposited onto stainless steel substrates have been evaluated with respect to their microstructure and deformation mechanisms. The microstructure and chemical composition have been investigated using a combination of scanning electron microscopy cross-sectional transmission electron microscopy and electron energy loss spectroscopy. The multilayer exhibited a columnar structure extending throughout the film thickness. Micrometer-sized macroparticles were present at various distances from the substrate, being incorporated in the growing film in the solid state. They consisted of a core structure with equiaxed

Keywords