WIT Press


DLC Thin Film Behaviour During Multiple-cycle Repeating Nano-indentation

Price

Free (open access)

Paper DOI

10.2495/TD120041

Volume

76

Pages

12

Page Range

43 - 54

Published

2012

Size

1,110 kb

Author(s)

N. H. Faisal, R. Ahmed, Y. Q. Fu, M. Hadfield & M. Alhoshan

Abstract

The aim of this investigation was to understand the localised failure behaviour of diamond like carbon (DLC) thin film during multiple-cycle repeating nanoindentation. The film investigated was 100 nm and 500 nm thick sputtered coated on two Si (100) wafers of 500 m thickness. Multiple-cycle repeating nano-indentation tests under diamond Berkovich and conical indenters were performed using a calibrated NanoTestTM at different load ranges between 0.1 mN and 200 mN. Each multiple-cycle nano-indentation test was conducted for a total of 20 cycles with the same load in each cycle at the same location. The shape of the indenter test probes, pre-existing residual stresses in films and indentation loads were critical in inducing the localized indentation stress leading to failure. Test results indicated forward deviation and backward deviation in force-displacement profile. An elastic finite element model during nano-indentation loading indicated that this was caused by the location of maximum stress near the interface. Keywords: DLC, multiple-cycle repeating nano-indentation, film failure.

Keywords

DLC, multiple-cycle repeating nano-indentation, film failure