Author(s)

X Q. Jiang & L. Blunt

Abstract

The needs of modern surface metrology assessment cover not only the extraction of roughness, waviness, but also identification of surface texture or the multi- scalar properties of a surface topography. In answer to this, the newly developing wavelet theory has been introduced into surface characterisation in 1994. Wavelet analysis employs time-frequency windows and offers the relevant time-frequency analysis, as a result, it can divide surface topography into different frequency components, and then study each component with the multi- resolution. This paper provides a survey of the most recent work in the field of surface metrology by using wavelet theory. The major wavelet models used in surface metrology will be introduced and the basic theory, algorithm and the properties of these models will also be discussed. 1 Introduction Typical surface analysis

Keywords