WIT Press


The NPL Small CMM - 3-D Measurement Of Small Features

Price

Free (open access)

Paper DOI

10.2495/LAMDAMAP010181

Volume

34

Pages

11

Published

2001

Size

1,379 kb

Author(s)

A. Lewis, S. Oldfield & G.N. Peggs

Abstract

The NPL Small CMM - 3-D measurement of small features A. Lewis, S. Oldfield & G.N. Peggs National Physical Laboratory, UK Abstract Macro sized objects (i.e. several centimetres in size) are routinely measured using conventional CMMs, which can achieve uncertainties of the order of a few micrometres. Conversely, nanometre and micrometre sized objects or features normally fall within the measurement capabilities of the field of nanometrology, where SPM-type instruments can achieve nanometric uncertainties. However the overlap between these two fields is not so good. There are few, if any nanometrology instruments that have ranges of several centimetres, yet which retain an uncertainty of a part per million. Similarly, there are no true 3-D CMMs that can achieve significantly better than a micrometre uncertainty for complex measurands. In order to address these shortfalls, NPL has designed and built a specialised CMM. The instrument has a working volume of 50 x 50 x 50 mm an

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