Author(s)

A. Tsuchiyama, M. Minami, Y. Shima, H. Hasuyama, Y. Takatani, Y. Hayashi & M. Masuda

Abstract

Influence of film thickness on corrosion resistance of diamond-like carbon films coated on aluminum A. Tsuchiyama*, M. Minami*, Y. Shima\ H Hasuyama^, Y. Takatani^, Y. Hayashi* & M. Masuda* ' Fukuoka Industrial Technology Center, Japan. ^ Kurume Institute of Technology, Japan. *Hyogo Prefectural Institute of Industrial Research, Japan. * Faculty of Engineering, Kyushu University, Japan. Abstract Diamond-like carbon (DLC) films are expected as the protection coatings against electronic devices, for which corrosion protection ability is very important in their surrounded environments. The purpose of this study is to examine the electrochemical behavior of DLC films coated on metallic substrates and to improve the corrosion resistance of coating films. DLC films were prepared by the ionization deposition method, in which the bias voltage was applied at -1.0 and -2.0kV. The film thickness of various kinds was controlled by the deposition time and was changed from 106 to 637nm. Benzene (C6H6) w

Keywords