Correlation Between Localized Corrosion Morphology And The State Of Interface Of Coated TiN Thin Film.
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M. Ohata & Y. Kimura
Correlation between Localized Corrosion Morphology and the State of Interface of Coated TiN Thin Film M. Ohata* and Yuji Kimura^ ^Graduate School, Kogakuin University, Tokyo, Japan ^Department of Environmental Chemical Engineering, Kogakuin University, Tokyo, Japan Abstract Ceramic thin film was widely used due to its superior mechanical and chemical characteristics. However, defects and micro cracks were always existed from the initial stage. In corrosive environment, these defects caused the problem of localized corrosion. Moreover, the evaluations of changes of structure and the state of interface between thin film and substrate which was brought about through employing different coating methods become extremely important. Therefore, TiN thin film coating used in this study was made by two different types of coating methods, that is, plasma CVD and Dynamic Ion Mixing (DIM), which have different interfacial strength. Then, defect morphology and nm or urn orders localized c