Author(s)

L. Valentin, E. Braca & J. M. Kenny

Abstract

This paper concentrates on recent advances in the chemical vapor deposition (CVD) and characterization of diamond and DLC films on non-diamond substrates. Arguments related to phase identification, nucleation and interfacial phenomena, morphology and defects as well as their correlation with mechanical properties are examined and discussed. Most of the information presented in this review is applicable to protective and wear resistant use of diamond coatings. 1 Introduction Results carried out in the last twenty years in the field of thin films deposition, demonstrated that good quality diamond can be grown by Chemical Vapor Deposition (CVD) at sub-atmospheric pressures where the metastable form of carbon can exist (fig.l). In the CVD process diamond films are dep

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