Author(s)

H. Chein & M.-H. Chen

Abstract

Estimation of VOCs emission factor for semiconductor manufacturing processes H. Chein & M.-H. Chen Center for Environmental, Safety and Health Technology, Industrial Technology Research Institute, Taiwan, R.O.C. Abstract Semiconductor manufacturing industry has contributed significantly to economic growth and become the most important industry in Taiwan. However, the emission of hazardous air pollutants (HAPs) produced by the industry is increasingly deteriorating the ambient air quality. A great amount of volatile organic compounds (VOCs) could be produced and emitted with waste gases from semiconductor manufacturing processes such as cleaning, etching, and photolithography. The goal of this study is to estimate the total VOCs emission from the semiconductor industry based on the establishment of the emission factor which is defined as the emission rate (kg/month) divided by the amount of chemical usage (L/month). The VOCs emission rate was measured by the continuous emission monitor

Keywords