WIT Press


Computational Solution Of A Two-phase Moving Boundary Problem With Two Moving Interfaces In Pulsed Laser Processing Of Semiconductors

Price

Free (open access)

Paper DOI

10.2495/MB030041

Volume

36

Pages

10

Published

2003

Size

426 kb

Author(s)

P. Přikryl, E. Gatskevich & R. ČernĂ½

Abstract

Computational solution of a two-phase moving boundary problem with two moving interfaces in pulsed laser processing of semiconductors P. PFikryll, E. Gatskevich2 & R. cerny3 a at he ma tical Institute of the Academy of Sciences of the Czech Republic, &tnd 25, 115 67 Prague I , Czech Republic 2~nstitute of Electronics, National Academy of Sciences of Belarus, 22 Logoiskii trakt, 220090 Minsk, Belarus :'~e~artment of Structural Mechanics, Faculty of Civil Engineering, Czech Technical University, Thdkurova 7, 166 29 Prague 6, Czech Republic Abstract A model of melting, evaporation and solidification of a binary alloy due to pulsed laser irradiation is formulated using the mass and internal energy balances in the liquid and solid phases, the vapor being assumed to be removed from the sample surface into vacuum instantaneously. The interface between the solid and liquid phases is modeled as a discontinuity surface where, in addition to balance conditions, an interface response function is formulat

Keywords