Author(s)

E.B. Nowacka & N.P. vd. Meijs

Abstract

In this paper we describe a hybrid element method which combines the boundary element method (BEM) and the finite element method (FEM) to calculate circuit models for lay- out dependent capacitances. The method can handle irregularities in the stratification of the layout of the integrated circuits (IC's). We present a stand-alone extraction program which we developed for validation and testing purposes. We show that the hybrid method can be included in our VLSI layout verification package Space. 1 Introduction Parasitic interconnect capacitances in integrated circuits (IC's) are playing an increas- ingly significant role in the circuit's performance. Therefore, designers of modern IC's rely heavily on lay out-to-circuit extraction systems, which produce an equivalent elec

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