Author(s)

J.-G. Lo, C.-C. Chang, S.-S. Ke & J.-D. Kuang

Abstract

Two methods were addressed in this paper to monitor the toxic volatile compounds in the environmental air of a semiconductor industrial area. A FTIR (open path Fourier Transform Infrared Spectroscopy) was set up at down wind side of fence line. We identified compounds such as ammonia, methanol, carbon tetrafluoride, sulfur hexafluoride in ppbv and sub-ppbv range including wind speed and wind direction. Besides, 34 samples were collected by stainless steel canisters each in three seasons over the whole industrial area and analyzed by GC/MS with automated sample injection and data acquisition. Over 40 compounds were detected. Acetone (fall 9.59ppbv, winter 7.47ppbv, spring 10.21 ppbv), dichloromethane (fall 0.46 ppbv, winter 0.38 ppbv, spring 1.09

Keywords