Author(s)

R. Cerny, P. Prikryl, G. Ivlev, E. Gatskevich & V. Chab

Abstract

Both numerical and experimental analyses of pulsed laser induced phase change processes in the near-surface region of monocrystalline bulk InSb are performed in the paper. In the theoretical part, thermal equilibrium and nonequilibrium models of melting, recrystallization and evaporation are formulated to describe transport phenomena in the material induced by laser irradiation. In the experimental part, InSb samples irradiated by the ruby (694 nm, 80 ns FWHM), and ArF (193 nm, 10 ns FWHM) lasers are studied using time resolved reflectivity, Auger electron spectroscopy and low energy electron diffraction methods to analyze surface modifications. A comparison of the experimental data with the nume

Keywords