Author(s)

M. Kurita & H. Yamashita

Abstract

Optical surface roughness measurement from scattered light approximated by two-dimensional Gaussian function M. Kurita, H. Yamashita Nagaoka University of Technology, Kamitomioka, Nagaoka, 940-21 Japan ABSTRACT A new optical method for measuring the surface roughness was proposed by using the standard deviations of a two-dimensional (2-D) Gaussian function approximating the scattered light intensity distribution. The surfaces of six kinds of ground specimens with the center line averaged roughness Ra of 0.05 to 1.6 /zm were illuminated with a LED light. The scattered light intensity distribution measured with a CCD camera was approximated by a 2-D Gaussian function, and its broadness was evaluated by using the standard deviations, a? and cr%, of the function. The standard deviation a* with respect to the direction perpendicular to the grinding increased with increasing Ra as #a = 0.013 exp(0.75(%=) On the other hand, the standard deviation &y with respect to the ground di

Keywords