Author(s)

V. Portman & B.Z. Sandier

Abstract

Contact deformations are treated as a potential force-to-motion converter, i.e., microactuator, for displacements in the submicron domain. The transformation factor of this converter equals the contact stiffness. Development of such microactuators for heavily loaded high precision equipment is the applying goal of the research. The results of experimental and theoretical investigations on the exploitation of contact deformations show that it is possible to obtain a transformation ratio 1-5 nm/H in the region of 10~3-10~5 mm with reproducibility 0.02-0.03 |im. 1 Introduction In certain branches of modern machining the required accuracy may be of the order of 10-2 jim. The design engineer working in this domain will encounter the following spec

Keywords