Author(s)

H. Freyer, A. Breitfeld, S. Ulrich, S. Schneider, R. Bruns & J. Wulfsberg

Abstract

During the last few years microsystem technology development has focused on designing smaller and smaller solutions for micro scaled integrated systems. On the one hand microsystems are the spearhead for how to build function integrated systems. On the other hand they are simple and low-cost, for example hydraulic motion systems. Actuators are one part of these systems and they are realized for linear or rotational movements. The state of the art for creating linear movements are conventional cylinder or bellow actuators . All these actuators are running with a flowing medium, for example air, oil or a smart fluid like an electrorheological fluid. All of these media need to be controlled by special valves, which have to be a part of the hydraulic system next to the main actuator. The diff iculties of these valves are that they need a lot of space and that they consist of many moving parts, which can be the reasons for leakage, wear and noise. One possible solution, to reduce the leakages in the valves design valves in special ways. Another way could be, to use valves without moving parts. Therefore, a smart fluid, for example an electrorheological fluid is needed. These smart fluids are able to generate an increasing flow resistance as a reaction to an electrical field. This flow resistance can be used to create a pressure difference, in front of the valve. A state of the art development in the electrorheological technology are electrorheological valves for dampers or vibration decoupling with comparatively high dimensions. These outer dimensions hinder the use of this

Keywords

electrorheological valve, micro channel, hydraulic actuator, MEMS, electrorheological effect, micro valve, electrorheological bellow actuator