Author(s)

V. Demidov

Abstract

A Madiematjca-based package for probe investigations of low-temperature plasmas has been developed. The package allows us to calculate probe current for high pressure and magnetized plasmas and to determine electron energy or velocity distribution functions from probe measurements in the plasmas. Besides it is possible to calculate electron velocity distribution functions from probe measurements in anisotropic low-pressure plasmas. 1 Introduction The electron energy or velocity distribution function (EDF) is one of the important low-temperature plasma characteristics. The electrical probe is practically the only instrument which allows us to conduct local measure- ments of the EDF [1]. Recently the range of conditions, under which probe measurements are possible, has been substantially extended [2,3]. It is pos- sible now to carry out the EDF probe measurements in high pressu

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